专利摘要:
It comprises contact means (3, 3b, 3c) with a mirror (M), actuation means (6, 6a, 6b) to generate a force applicable to said contact means (3, 3b, 3c) and an oscillating element (2) that oscillates around a joint (2a), said oscillating element (2) being associated with said contact means (3, 3b, 3c) and with a transmission spring (4) in a stretched state that connects said oscillating element (2) and said actuation means (6, 6a, 6b). It comprises a second spring (5) in the stretched state that connects the oscillating element (2) to a support point (5a). (Machine-translation by Google Translate, not legally binding)
公开号:ES2751223A1
申请号:ES201930685
申请日:2019-07-24
公开日:2020-03-30
发明作者:Martinez De Lapera Nahikari Gonzalez;Gonzalez Fernandez Joaquin Benchomo;Roman Josep Nicolas;Peroliu Carles Colldelram;Claude Ruget
申请人:Consorci per a la Construccio Equipament i Explotacio del Laboratori de Llum Sincrotro;
IPC主号:
专利说明:

[0001]
[0002] Mirror curvature correction device.
[0003]
[0004] Technique sector.
[0005]
[0006] The present invention relates to a mirror curvature correction device, especially mirrors used in particle accelerators.
[0007]
[0008] State of the art.
[0009]
[0010] Some particle accelerators supply photon or light beams (usually X-rays) to various experimental stations (light lines or 'beamlines') that use these photon beams for research and testing in various fields, such as bioscience, condensed matter or materials science.
[0011]
[0012] Each light line includes a series of optical elements that convert the divergent and broadband light source beam emitted by the light source into a beam with the properties required by the specific experimental technique, which is normally monochromatic and is in focus.
[0013]
[0014] Because reflection by curved surfaces is the most efficient way to focus these light beams, special concave curved mirrors are used to perform this function.
[0015]
[0016] These mirrors are polished in a flat state with a high degree of precision, and then the mirror is arranged in a special device for bending this type of mirror (known as 'bender', in English) that applies a torque to the ends of the mirror and introduces a controlled deformation in the mirror that allows it to be shaped into the desired shape (usually elliptical) from its original flat shape.
[0017]
[0018] Once curved, the mirror has a concave surface in which the light beam hits at a very low angle and in which it is reflected.
[0019]
[0020] Despite being manufactured as accurately as possible, the curved mirror features deviations from its ideal mathematical curvature once it has been curved. These deviations cause distortions in the wavefront of the light beam that is reflected by the mirror, which can cause a lack of homogeneity of the beam when it reaches a sample or an increase in the size of the beam in the focused location.
[0021]
[0022] Therefore, it is desirable to correct as far as possible these dimensional deviations of the mirror to improve the quality of the reflected light beam.
[0023]
[0024] In the Spanish patent publication ES 2 552 225 A1, commonly owned with the present patent application, and which is incorporated in its entirety herein for reference purposes, a device for bending mirrors is disclosed that allows correcting the dimensional deviations described above. The device of ES 2 552225 A1 comprises two lateral supports on which the ends of a mirror are supported and corresponding pushers to bend the mirror against the supports. The device also comprises at least one corrective device movable between the two lateral supports and comprising means for joining the mirror and driving means for transmitting a force to said joining means, said driving means comprising a driving mechanism movable with respect to said joining means and a spring that connects the driving mechanism to said joining means, so that the spring transmits a force exerted by the driving mechanism to the joining means to deform the mirror and correct its curvature, and thus mode, its dimensional deviations. The spring is in a stretched state in any operating position of the drive mechanism with respect to the joining means.
[0025]
[0026] The device of ES 2552225 A1 has the advantage that it uses a spring in a stretched state to transmit the force exerted by a drive mechanism to the mirror to deform it and correct its curvature. As explained in ES 2 552 225 A1, the prior art solutions used springs in a compressed state to transmit the force exerted by a drive mechanism to the mirror, in order to improve the resolution of the force that could be applied to the mirror to correct its curvature. A stretched or tensile spring is intrinsically more stable than a spring in a compressed state, which can suffer a buckling effect, so that forces can be applied to the mirror with a resolution higher than that obtained with compression springs and obtain greater repeatability of the force values applied by the spring when used to make measurements on different mirrors or at different locations.
[0027]
[0028] However, the correction device described in ES 2 552 225 A1 has the drawback that, in order to exert a force in opposite directions on an area of the mirror, that is, to deform it and correct its curvature in one or the other direction, it is necessary to change the position of the spring S between a first position and a second position (see Figs. 6a and 6b in ES 2552225 A1, respectively). This requires the intervention of an operator, who must act directly on the device to arrange the spring in one or another position. Taking into account that the device will almost always be installed during use in isolated vacuum or ultra-high vacuum environments, the intervention of an operator to modify the direction of the force applied to the mirror will mean disassembling part of the device from the mirror, removing this part of the device from the vacuum or ultra-high vacuum environment, make the necessary modifications and reintroduce it into the vacuum or ultra-high vacuum environment and mount it on the mirror.
[0029]
[0030] This involves investing a great deal of time in mounting and dismounting the device, handling the spring, and adjusting the device each time it is re-mounted on a mirror.
[0031]
[0032] Taking into account the above, a mirror curvature correction device of the type described in ES 2552225 A1 would be desirable, but which allows forces to be exerted on opposite areas of the mirror without having to remove it from the mirror and without having to dispose of it. the spring in one of the two functional positions.
[0033]
[0034] Explanation of the invention
[0035]
[0036] The objective of the present invention is to solve the drawbacks of the devices known in the art, disclosing a mirror curvature correction device, which comprises contact means with a mirror, actuation means to generate a force applicable in said contact means and an oscillating element that oscillates around a joint, said oscillating element being associated with said contact means and with a transmission spring in a stretched state that connects said oscillating element and said actuating means, characterized by the fact that it comprises a second spring in a stretched state that connects the oscillating element to a support point.
[0037]
[0038] Preferably, the springs are coil type springs. Also preferably, the elastic constant of the transmission spring and the elastic constant of the second spring are substantially the same.
[0039]
[0040] Advantageously, the oscillating element is associated, in a first part thereof arranged on one side of the joint, with one of the springs and the contact means and, in a second part thereof arranged on the opposite side of the joint, with the other dock.
[0041]
[0042] Preferably, the transmission spring comprises a first end associated with the first part of the oscillating element and a second end associated with the driving means, said driving means comprising a mechanism that allows said second end of the transmission spring to be displaced.
[0043]
[0044] Also preferably, the second spring comprises a first end associated with the second part of the oscillating element and a second end associated with a support point associated with the device.
[0045]
[0046] Thanks to this configuration, the application of force on the mirror is carried out by combining the action of two springs that are always in a stretched state and that each exert a corresponding force in the opposite direction on the mirror, as will be explained in more detail. detailed later.
[0047]
[0048] In this way, the device of the present invention allows forces of variable magnitude and in opposite directions to be exerted on a mirror to deform it and locally correct its curvature without it being necessary to change the position of a spring depending on whether it is desired to apply a force to the mirror in one direction or another and, thus, without the need to disassemble and remove the device from a vacuum or ultra-high environment to carry out this operation, as was the case with the device described in ES 2552225 A1.
[0049]
[0050] Advantageously, the joint comprises a part that includes a deformable area elastically whose deformation allows the oscillation of the oscillating element around said elastically deformable zone.
[0051]
[0052] This type of articulation allows to obtain an absence of games and a minimum resistance to the movement of rotation of the oscillating element around it, therefore improving the precision of the device.
[0053]
[0054] Also advantageously, the device comprises at least a first magnetic element associated with the oscillating element and at least a second magnetic element associated with a fixed part of the device, said magnetic elements being arranged to interact with each other.
[0055]
[0056] The presence of said magnetic elements has the dual function of compensating the forces of flexural resistance of the joint, so that said joint is a joint that has practically no resistance to rotation within an angular range, and of eliminating variations in the application of force by the springs due to changes in the position of the point of contact between the means of contact with the mirror and the mirror, as will be explained in more detail later.
[0057]
[0058] Preferably, the contact means comprise support means for contacting one of the mirror faces and support means for contacting the opposite face of the mirror. Also preferably, the support means comprise at least one bearing for contacting the mirror.
[0059]
[0060] The use of bearings eliminates the introduction of any force on the mirror that is not perpendicular to the plane defined by the two main faces of the mirror and that could undesirably distort the mirror and affect the accuracy of the mirror correction.
[0061]
[0062] Brief description of the content of the drawings.
[0063]
[0064] In order to facilitate the description of what has been previously exposed, some drawings are attached in which, schematically and only by way of non-limiting example, a practical case of embodiment of the curvature correction device of mirrors of the invention, in which:
[0065]
[0066] Fig. 1 is a perspective view of a mirror bending device including three mirror bending correction devices according to the present invention;
[0067]
[0068] Fig. 2 is a perspective view of a mirror curvature correction device according to the present invention; Y
[0069]
[0070] Fig. 3 is a simplified schematic view of the device shown in Fig. 2.
[0071]
[0072] Detailed exposition of embodiments of the invention.
[0073]
[0074] Fig. 1 shows a device for bending mirrors, indicated as B, which supports a mirror M which has a narrow and elongated shape and which is supported by its two free ends on lateral supports S of device B. Device B allows the mirror M to be bent by means of corresponding pushers P located next to the lateral supports S, on the mirror M, located more towards the center of the device B than the lateral supports S. These pushers P apply a downward directed force, so that the mirror M, supported by the lateral supports S, curves or flexes downwards, acquiring a more or less concave configuration depending on the force applied by the pushers P.
[0075]
[0076] The characteristics and operation of device B will only be briefly described herein, since a detailed description thereof is not necessary for the purpose of the object of the invention. Reference is again made to document ES 2552225, where a more detailed description of this type of device can be found.
[0077]
[0078] As can be seen, the device B comprises in the example shown in Fig. 1 three mirror curvature correction devices D according to the present invention. The function of these devices D is to correct the possible dimensional deviations of the mirror M with respect to its ideal mathematical form once it has been curved by device B.
[0079]
[0080] Each device D can be arranged in a fixed position with respect to device B a along the same and of the mirror M to deform the mirror M in a desired area thereof. The fixing of device D with respect to device B is carried out by means of screws that connect one of the sides of device D (hidden in the figures) to one of the side walls B1 of device B through corresponding holes. The number and longitudinal position of the D devices may be different from that shown in Fig. 1.
[0081]
[0082] Also referring specifically to Figs. 2 and 3, the mirror curvature correction device D of the present invention will now be described in detail.
[0083]
[0084] Device D comprises a frame 1 which, as mentioned above, can be fixed in any fixed position with respect to device B along the same.
[0085]
[0086] The device D also comprises a horizontal oscillating bar 2 articulated with respect to the frame 1 by means of a link 2a. The oscillating bar 2 is hinged (eg by a bearing) by a free end disposed on one side of the hinge 2a (left side in Figs. 2 and 3) to a yoke 3 which extends vertically upwards and to the end upper part of a helical transmission spring 4 extending vertically downwards. The connection points of the yoke 3 and the transmission spring 4 to the oscillating bar 2 are arranged substantially vertically aligned with each other. The oscillating bar 2 is also connected at a point arranged on an opposite side of the joint 2a (right side in Figs. 2 and 3) to the upper end of a second coil spring 5. The oscillating bar 2 comprises at its other free end (right side), on the upper surface of the bar 2, a magnetic element 2b arranged to interact with another magnetic element 1b attached to a cantilevered part of the frame 1 and arranged opposite said magnetic element 2b at a certain distance from it.
[0087]
[0088] Referring again to the joint 2a, it can be seen that it comprises a plate-shaped part with a central narrowing 2c. The narrowing 2c divides the joint 2a into two halves, one of the halves being associated with the oscillating bar 2 and the other half being associated with the frame 1. Said narrowing 2c is elastically deformable to flexion, and functions as a point or axis of articulation of the joint 2a and, therefore, of the oscillating bar 2, as a hinge elastic. This type of articulation 2 allows total rigidity to be obtained in all dimensions except the articulation axis, as well as a minimum resistance to rotation of the articulated elements.
[0089]
[0090] The fork 3 comprises a lower part hingedly connected to the free end of the oscillating bar 2 and an upper part comprising two arms 3a that extend next to the lateral parts of the mirror M. Each arm 3a comprises a support 3b that contacts the lower face of the mirror M and another support 3c that contacts the upper face of the mirror M, so that two supports 3b are in contact with the lower face of the mirror M and two other supports 3c are in contact with the upper face of the mirror M. As can be seen in Fig. 2 (in which the mirror has not been shown for clarity), these supports 3b, 3c are bearings, which allows a purely perpendicular force to be applied with respect to the plane defined by the two main faces of the mirror and avoid the presence of lateral forces that could distort the mirror M in an undesired way. The fork 3 can comprise a system that allows modifying the distance between the supports 3c and the supports 3b to adapt them to mirrors with different thicknesses (or distances between their upper and lower faces).
[0091]
[0092] Device D also comprises a drive mechanism comprising an electric motor 6 fixed to the frame 1 that rotates a spindle 6a extending in a vertical direction and in parallel with respect to the transmission spring 4. A nut element 6b is screwed onto the spindle 6a without turning capacity, so that when the electric motor 6 rotates the spindle 6a in one direction or in the opposite direction, the nut element 6b moves up or down , as indicated by the direction arrows in Fig. 3. The transmission spring 4 is connected at its lower end to the nut element 6b.
[0093]
[0094] The second spring 5 is connected at its lower end to a support point 5a associated with the frame 1. The support point 5a is fixed with respect to the frame 1 during the operation of the device D, although it is possible to previously modify its vertical position by means of a screw mechanism 5b (see Fig. 2), in order to regulate and adjust the degree of stretching of the second spring 5.
[0095]
[0096] Both springs 4 and 5 are in a stretched state at all times, so that the transmission spring 4 exerts a downward force on the free end of the oscillating bar 2 arranged on the left side of the joint 2a and, therefore, on the fork 3, so that the supports 3c also exert a downward force on the upper face of the mirror M, and the second transmission spring 5 it exerts a downward directed force on the connection point to the oscillating bar 2 arranged on the right side of the articulation 2a, which, through said articulation 2a and the lever effect of the oscillating bar 2, is transformed into a force directed towards above exerted by the fork 3 and by the supports 3b on the underside of the mirror M.
[0097]
[0098] In other words, the transmission spring 4 allows a force to be applied in a specific area of the mirror M in one direction (downward) and the second spring 5 allows a force to be applied in said area in an opposite direction (upward).
[0099]
[0100] In this way, the operation of the device D of the present invention is based on combining the force applied by both springs 4, 5 to apply a determined force on the mirror M in order to deform it and correct possible dimensional deviations from it. Thanks to this combination, it is possible to apply forces of different magnitude and of different direction on a certain area of mirror M.
[0101]
[0102] As described above, the transmission spring 4 is connected at its upper end to a connection point of the oscillating bar 2 vertically aligned with the connection point between the oscillating bar 2 and the fork 3 and is connected at its end lower than nut element 6b. In this way, the upward displacement of the nut element 6b decreases the degree of stretch of the transmission spring 4 and the downward displacement of the nut element 6b increases the degree of stretch of the transmission spring 4. A greater stretch of the transmission spring 4 corresponds to a greater downward directed force applied on one of the sides of the oscillating bar 2, on the fork 3, on the supports 3c and, consequently, on the upper face of the mirror M Conversely, a lower stretch of the transmission spring 4 corresponds to a lower downward force applied on said elements.
[0103]
[0104] The second spring 5 remains fixed during the operation of the device D, that is, it exerts a substantially constant and invariable force on the opposite side of the oscillating bar 2 and, therefore, a substantially constant and invariable force directed upwards on the fork 3, on the supports 3b and on the underside of the mirror M. Tal As described above, it is possible to modify to some degree the pre-stretching of the second spring 5 by means of the screw mechanism 5b, which displaces the lower end of the second spring 5 vertically to make adjustments in the constant force that said spring 5 will apply.
[0105]
[0106] With the foregoing in mind, a series of practical examples of applying different forces in a mirror M by means of the mirror curvature correction device D of the present invention will be described below in order to correct its curvature.
[0107]
[0108] A transmission spring 4 and a second spring 5 with the desired characteristics are selected. The second spring 5 is arranged in a stretched state in the device D as shown in Figures 2 and 3, and by means of the screw mechanism 5b it is adjusted so that it exerts a constant force of 20 N directed upwards on the fork 3 The transmission spring 4 is also arranged in a stretched state in the device D. The downwardly directed force exerted by the transmission spring 4 on the fork 3 will depend on its degree of stretching, that is, on the position of the nut.
[0109]
[0110] In this way, for example, if it is desired to apply a force of 15 N directed upwards on the lower surface of mirror M, the transmission spring 4 will be stretched to a state in which it exerts a force of 5 N directed towards down on fork 3.
[0111]
[0112] If it is desired to apply a downward 15N force on the top surface of mirror M, the drive spring will be stretched to a state where it exerts a downward directed 35N force on fork 3.
[0113]
[0114] It can be seen that, in the described example, the range of forces applicable in the mirror M could be varied between 20 N (upward force), which is the force exerted by the second spring 5 on the fork 3, and the force resulting from add the force exerted by the transmission spring 4 and the force exerted by the second spring 5 on the fork 3. In this case, for example, if the maximum force in the maximum stretching state that the transmission spring 4 can exert on the fork 3 is -40 N, the resulting force would be equal to -20 N (downward force), so that the interval of application of forces is -20 N to 20 N.
[0115]
[0116] It is possible to modify the range of forces applicable in mirror M by modifying the force that transmission spring 4 and second spring 5 are capable of exerting on mirror M (for example, by selecting a more or less rigid spring 4 and spring 5 ). For example, it is possible to use a second spring 5 that is capable of exerting a constant force of 30 N directed upwards on the underside of mirror M and use a transmission spring 4 that is capable of exerting a maximum force of 60 N directed down on the upper surface of mirror M, thereby obtaining a range of application of forces from -30 N to 30 N. It would also be possible to modify the pre-stretching of the second spring 5 by means of mechanism 5b, so that, for example , the second spring 5 exerts a force of 30 N instead of 20 N. With respect to the example described above, the range of applicable forces in mirror M would move from [-20 N, 20 N] to [-10 N, 30 N].
[0117]
[0118] It should also be noted that the transmission spring 4 will at all times be in the stretched state, so that even when the maximum nominal force is applied to the mirror M by the second spring 5 (in the previous example, 20 N), the spring 4 The transmission shaft will remain stretched, exerting a minimum force offset by an additional minimum equivalent force exerted by the second spring 5.
[0119]
[0120] From the foregoing, it can be seen that the device D of the present invention allows forces to be exerted in the opposite direction in an area of the mirror M to correct the possible dimensional deviations thereof with respect to its ideal mathematical form without the intervention being necessary. of an operator to change the position of the springs and without removing the device D from the associated mirror. The application of forces from different directions on the mirror M is carried out simply by stretching the transmission spring 4 to a greater or lesser extent, through the motor 6 that displaces the nut element 6b.
[0121]
[0122] In addition, the device D of the present invention not only allows possible dimensional deviations of the mirror M due to its configuration to be corrected in situ (in its working environment), but also allows to correct dimensional deviations of the surface of the mirror M due to changes of temperature that occur while in use, caused by the fraction of light absorbed by the mirror.
[0123] Reference is now made to the magnetic elements 1b, 2b and, again, to the joint 2a.
[0124]
[0125] The use of the magnetic elements 1b, 2b is intended to fulfill two functions.
[0126]
[0127] Firstly, the magnetic elements 1b, 2b allow to compensate the resistance to deformation of the narrowing 2c of the joint 2a during its operation, introducing a torque created by the interaction of the magnetic elements 1b, 2b in the joint 2a. This torque introduced by the magnetic elements makes it possible to obtain an angular interval within which the joint 2a has practically no resistance to rotation. In this way, a joint 2a is obtained which, in addition to being rigid in all dimensions with the exception of the joint axis, unlike, for example, a bearing, which has a certain lateral play, also has practically a resistance there is no rotation of the articulated elements, so that the application of force on the mirror M by means of the device D is more precise and repeatable. Reference is made to the Spanish patent publication ES 2599398 A1, of common ownership with the present patent application, in which a detailed description of this articulation system can be found, and which is incorporated in its entirety herein for the purposes of reference.
[0128]
[0129] Secondly, the magnetic elements 1b, 2b also have the function of eliminating variations in the application of force on the mirror M by the springs 4, 5 when relative displacements occur between the device D of the invention and the mirror M, whether these are caused by mechanical drifts or changes in the general curvature of the mirror M. In this case, it is possible that the support points 3b, 3c move due to dimensional variations of the mirror M, which would cause a corresponding deformation of the springs 3, 4, which would exert forces different from those previously applied to mirror M. Thanks to the interaction of the magnetic elements 1b, 2b, it is possible to compensate for the effect produced by the displacement of the support points 3b, 3c, making that the application of force by the springs 4, 5 is practically insensitive (variation less than 0.01 N) to said displacement in a displacement interval of ± 0.5 mm from support points 3b, 3c. In this way, the magnetic elements 1b, 2b stabilize the applied force with respect to thermal drifts and changes in the general curvature of the mirror M. In addition, the stabilization Obtained by this system allows the use of springs 4, 5 more rigid and, therefore, shorter, which in turn allows to reduce the height of device D and, thus, its size. This reduction in size is important since device D is normally used in locations (vacuum chambers) with little available space. Reference is made to the Spanish patent publication ES 2603 655 A1, commonly owned with the present patent application, in which a detailed description of this stabilization system can be found, and which is incorporated in its entirety herein by reference effects.
[0130]
[0131] Although two mutually attracted interacting magnetic elements are used in the shown embodiment, it would be possible to use other configurations of magnetic elements with different interactions and with a different number of magnetic elements.
[0132]
[0133] Likewise, hinge 2a could also have a different configuration to that described above (eg special bearings), although a flexible hinge configuration is preferable due to its optimal stiffness characteristics, low friction and simplicity (it would also be possible to use joints flexible cap type).
[0134]
[0135] Preferably, all the connection points of the springs 4, 5 to other parts (oscillating bar 2, mechanism 5b, nut element 6b) will be articulated by means of low friction systems (for example, by means of special bearings), in order to eliminate forces torsion at these connection points.
[0136]
[0137] It would be possible to use a configuration of device D in which the drive spring 4 (and the corresponding mechanism 6, 6a, 6b) and the second spring 5 (and the corresponding support point 5a) are connected to the opposite sides of the bar oscillating 2, that is, invert its position, although the configuration shown in the described embodiment is preferable.
[0138]
[0139] All the mechanical components of the device D of the present invention are designed to operate in vacuum or ultra-high vacuum environments, so that they can operate reliably and continuously in environments where mirrors to be deformed are usually installed.
[0140] It should be noted that it is preferable that both springs 4, 5 have the same elastic constant. The device D of the invention can be installed in environments in which temperature changes occur that can cause dimensional changes in said device D (essentially in the frame 1) by expansion or contraction. These dimensional changes could cause a change in the elongation of each spring 4, 5 and, thus, a variation in the force applied by each one of them, which is not desirable for the stable operation of device D. If the two springs 4, 5 have the same elastic constant, the effect of dimensional changes in frame 1 on one spring will be essentially offset by the effect of dimensional changes in frame 1 on the other spring, acting in the opposite direction, especially if both springs have a similar or equivalent length.
[0141]
[0142] The springs 4, 5 will preferably have a helical configuration, although they may have other alternative configurations, as long as they work at all times in traction or in the stretched state.
[0143]
[0144] The mechanism (6, 6a, 6b) for actuation of device D may be different from that of the embodiment shown, for example, the connection between the spindle and the nut element may be by twisting or by balls, or the mechanism may be a hydraulic mechanism, etc.
[0145]
[0146] The combination of elements described above allows obtaining a mirror curvature correction device D that can be used in vacuum or ultra-high vacuum environments without the need to extract it from them to adjust it in order to apply forces on the mirror in the opposite direction , with a reduced size, high precision (thanks to the use of stretched springs that work in traction and with minimal friction it is possible to apply correction forces with a resolution of less than 0.01 N) and with great repeatability.
权利要求:
Claims (10)
[1]
1. Mirror curvature correction device (D) (M), comprising contact means (3, 3b, 3c) with a mirror (M), driving means (6, 6a, 6b) to generate an applicable force in said contact means (3, 3b, 3c) and an oscillating element (2) that oscillates around a joint (2a), said oscillating element (2) being associated with said contact means (3, 3b, 3c) already a transmission spring (4) in a stretched state that connects said oscillating element (2) and said actuation means (6, 6a, 6b), characterized in that it comprises a second spring (5) in a stretched state that connects the oscillating element (2) to a support point (5a).
[2]
2. Device (D) according to claim 1, wherein the springs (4, 5) are coil type springs.
[3]
Device (D) according to claim 1 or 2, wherein the elastic constant of the transmission spring (4) and the elastic constant of the second spring (5) are substantially the same.
[4]
Device (D) according to any of claims 1 to 3, wherein the oscillating element (2) is associated, in a first part thereof arranged on one side of the joint (2a), with one of the springs and with the contact means (3, 3b, 3c) and, in a second part thereof arranged on the opposite side of the joint (2a), to the other spring.
[5]
5. Device (D) according to claim 4, wherein the transmission spring (4) comprises a first end associated with the first part of the oscillating element (2) and a second end associated with the means (6, 6a, 6b) drive, said drive means (6, 6a, 6b) comprising a mechanism that allows said second end of the transmission spring (4) to be displaced.
[6]
6. Device (D) according to claim 4, wherein the second spring (5) comprises a first end associated with the second part of the oscillating element (2) and a second end associated with a support point (5a) associated with the device (D).
[7]
Device (D) according to any of the preceding claims, wherein the articulation (2a) comprises a part that includes an elastically deformable area (2c) whose deformation allows the oscillation of the oscillating element (2). around said zone (2c) elastically deformable.
[8]
Device (D) according to any of the preceding claims, wherein the device (D) comprises at least a first magnetic element (2b) associated with the oscillating element and at least a second magnetic element (1b) associated with a fixed part of the device (D), said magnetic elements (1a, 1b) being arranged to interact with each other.
[9]
9. Device (D) according to any of the preceding claims, wherein the contact means (3, 3b, 3c) comprise support means (3b, 3c) for contacting one of the mirror faces (M) and means ( 3b, 3c) support to contact the opposite face of the mirror (M).
[10]
10. Device (D) according to claim 9, wherein the support means (3b, 3c) comprise at least one bearing to contact the mirror (M).
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同族专利:
公开号 | 公开日
ES2751223B2|2021-04-06|
引用文献:
公开号 | 申请日 | 公开日 | 申请人 | 专利标题
JPH0666998A|1992-06-16|1994-03-11|Nkk Corp|Mirror device|
JPH10148706A|1996-11-21|1998-06-02|Nikon Corp|Bending mirror|
JP2002131490A|2000-10-24|2002-05-09|Ishikawajima Harima Heavy Ind Co Ltd|Light condensing spectroscope|
ES2552225A1|2015-05-27|2015-11-26|Consorci Per A La Construcció, Equipament I Explotació Del Laboratori De Llum De Sincrotró|Mirror bending device |
ES2603655A1|2016-04-21|2017-02-28|Consorci Per A La Construcció, Equipament I Explotació Del Laboratori De Llum De Sincrotró|Device and method of applying force to an object |
ES2599398A1|2016-09-01|2017-02-01|Consorci Per A La Construcció, Equipament I Explotació Del Laboratori De Llum De Sincrotró|Articulation device |
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ES201930685A|ES2751223B2|2019-07-24|2019-07-24|MIRROR CURVATURE CORRECTION DEVICE|ES201930685A| ES2751223B2|2019-07-24|2019-07-24|MIRROR CURVATURE CORRECTION DEVICE|
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